Customised 5-Axis Manipulator for cleanroom operation
Positioning stability, dynamics and precision are crucial in the field of in-line wafer inspection to maximise throughput. PM was requested to deliver a multi-axis positioning solution for smooth high-speed scanning and reliable operation. Our system engineers worked closely together with the customer to understand their project needs and achieve critical project goals.
The challenges
- Achieve a lead time as low as possible;
- Design of a fast and accurate wafer stage with a box frame to let x-ray beams pass;
- Make a modular design to improve upgradability;
- Cleanroom ISO class 6 compatible.
The application
For next-generation wafer inspection, the customer developed a non-contact, non-destructive measurement for inline front-end processes. The benefits range from stand-alone applications to fully automated inline measurements where every single wafer can be measured in production.
Results
- The first prototype was delivered within the time budget after the start of the project. This was a result of the fact that all company competences were combined. This allowed for great collaboration of the design, manufacturing and assembly processes;
- The box frame was optimised for stiffness to get a high as possible system bandwidth to make sure that settling times and accuracies were according to specification;
- The modular design allows for various configurations of the system. The system can either be equipped with 5 or 7 motion axis. Also, if needed, a vibration isolation system can be integrated.
Specifications
Stroke X-Y: 1050 mm x 490 mm
Speed: 1.4 m/s
Acceleration; 5 m/s2 for X-axis
Acceleration: 1 m/s2 for Y-axis
Stroke Z: 55 mm
Speed: 5 mm/sec
Drift: 50 nm in 20 sec
Dual driven linear motor / AC motor-driven
Cleanroom ISO class 6 compatible
Repeatability short term < 5 µm
Repeatability long term < 10 µm
Jitter 50 nm/20 sec. upper X-Y axis
Jitter 1 µm/20 sec. lower X-Y axis
Absolute accuracy < 15 µm
Linear guides XY combined with low profile ball recirculating units for long travel
Capabilities
PM offers unique in-house capabilities with extensive R&D and engineering service, application expertise for vacuum and ultra-high vacuum environments, in-house manufacturing, cleanroom assembly and various metrology and testing equipment. For more detailed information please see our competence page.
Reach Out to Our Specialists
Let’s talk about your application
Put our engineering and application know-how to work for you. Contact us today to discuss your high-performance motion system application.
Let’s talk.
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